Russia Unveils Its First Domestic Photolithography Machine
The country’s first homegrown photolithography tool, developed with Belarusian partners, will support power electronics, automotive chips, and industrial systems—marking a key step in semiconductor independence.
Russia has completed the development of its first domestic photolithography machine with a resolution of 350 nanometers, according to the press service of Mikron, part of the Element Group.
This technology is used in power electronics, automotive components, and industrial systems. The new tool is designed both to upgrade existing microelectronics production lines and to equip new ones. Serial production is being launched by the Zelenograd Nanotechnology Center and the Element Group’s “Industry Solutions” division.
The system was built with the participation of Belarusian company Planar and is intended for 350 nm process nodes required in today’s microelectronics plants. Developers say this is only the first step toward a full line of Russian-made lithography machines. Future models are expected to support 90 nm technology nodes.
