ZNTC to Develop Russian Scanning Microscope
It is needed for quality control of manufactured microchips.
Zelenograd Nanotechnology Center will develop a Russian scanning microscope for quality control of manufactured chips. The new device is intended to replace imported equipment previously supplied from Japan.
The contract between the Russian Ministry of Industry and Trade and Zelenograd Nanotechnology Center is worth 2.37 billion rubles.
The critical dimension scanning electron microscope (CD-SEM) will be developed to inspect wafers with diameters of 100, 150 and 200 millimeters. The prototype will be designed for 200-millimeter wafers.
The microscope is needed to measure the parameters of critical microchip elements, including line widths, contact hole diameters, distances between elements of periodic structures and line-edge roughness.
All critical components of the future device must be manufactured in Russia. The project must be completed by June 30, 2030.
